Brooks Automation 001-4130-03

一、技术规格

• 对准精度：X/Y方向达到±2μm，θ方向达到±0.1mrad。
• 重复性：X/Y方向为0.5μm，θ方向为0.05mrad。
• 扫描范围：X/Y方向为±20mm，θ方向为±5°。
• 速度：X/Y方向为100mm/s，θ方向为10°/s。

二、功能特点

1. 高精度晶圆对准：该模块采用高精度传感器和伺服驱动器，能够控制晶圆的X、Y、θ三个方向的运动，确保晶圆与目标位置完美对准。
2. 良好的兼容性：该模块兼容各种晶圆尺寸和材料，适用于多种晶圆加工工艺。
3. 高性能控制：设计用于提供精确的运动控制或过程控制，适用于要求严格的自动化应用，如半导体制造设备、精密定位系统或高级制造业中的物料处理。
4. 集成性：具备良好的系统集成能力，可以轻松与Brooks Automation的其他设备以及第三方设备通信，实现复杂自动化流程的统一管理。
5. 智能化功能：包含智能诊断、自适应控制或远程监控等功能，便于维护和优化系统性能。
6. 稳定性与耐用性：面向工业环境设计，可能具备防尘、抗振和宽温工作范围等特性，确保在严苛条件下长期稳定运行。

三、应用场景

Brooks Automation 001-4130-03模块广泛应用于半导体制造的晶圆前道工艺，包括光刻、刻蚀、沉积、扩散、离子注入等。

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